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AMEC TO PARTICIPATE IN MEMS AND SENSORS

SHANGHAI, China & Napa, Calif. Oct. 11, 2017—This year, for the first time, AMEC is pleased to participate in the MEMS and Sensors Executive Congress as a Gold Sponsor. The event, which gathers executives from leading companies in the global MEMS and Sensors ecosystem, is organized by the MEMS and Sensors Industry Group, a strategic association partner of SEMI. It will be held in San Jose, Calif., Nov.1-2.

At the premier conference, AMEC executives will be on hand to share details on the company's etch technology for MEMS applications. AMEC has achieved steady success in Europe, with its Primo TSV etch tools already installed in R&D and production at leading European MEMS manufacturing fabs.

"With a twin-chamber design and patented process switching, the differentiated tools are valued by customers for enabling better CD uniformity, as well as extremely low center-to-edge trench tilting, and improved productivity—all at a highly competitive cost," said Dr. Tom Ni, Vice President and General Manager of AMEC's ICP Etch Product Division.

Now, with proven performance in Europe, AMEC intends to offer its etch solutions to US MEMS manufacturers to help them achieve their MEMS design and manufacturing goals.

K H Koh, Vice President for AMEC's MEMS Business, added: "Our industry-leading etch systems for MEMS applications were developed in close collaboration with customers," he said. "Embedded in each TSV etch tool are proprietary innovations that are also found in our portfolio of dielectric etch, poly etch and plasma dicing tools. When combined with our customer-focused model, this deep etch expertise allows us to provide superior technology solutions with rapid response times, which is extremely important to our MEMS customers."

Advanced Micro-Fabrication Equipment Inc. (AMEC)
AMEC is China's leading provider of advanced process technology to global manufacturers of semiconductors and solid-state lighting (SSL) products. Headquartered in Shanghai, the company is an entrenched supplier of dielectric and TSV Etch tools, helping chipmakers build devices at process nodes as low as 5nm. To date, more than 600 AMEC process units have been positioned at 39 leading-edge semiconductor fabs across Asia. The company is also well established in Europe with AMEC MEMS tools running in production at major IDMs. In addition, with its MOCVD system, the company helps SSL manufacturers build today's most advanced LED products. To learn more about AMEC, please visit www.amec-inc.com.

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